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Microstructural and indentation characterization of Ti/TiN multilayer films

✍ Scribed by R.F. Huang; L.S. Wen; L.P. Guo; J. Gong; B.H. Yu; H. Bangert


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
565 KB
Volume
50
Category
Article
ISSN
0257-8972

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