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Microscopic motion of hydrogen in the dilute and clustered phases of hydrogenated amorphous silicon

✍ Scribed by P. Hari; P.C. Taylor; R.A. Street


Book ID
115989005
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
293 KB
Volume
164-166
Category
Article
ISSN
0022-3093

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## Abstract Columnar growth was observed in the amorphous part of mixed phase layers deposited at very low substrate temperatures. The width of the columns and the layer thickness at which they are first distinguishable in a cross‐sectional transmission electron microscope (X‐TEM) image, about 120