Microscope-spectrophotometric analysis to determine the origins of the colour variations on SIMOX wafers

✍ Scribed by Karen J. Reeson; Alan J. Criddle; Peter Pearson; Richard J. Chater; Kim Christensen; John Alderman; G. Roger Booker; John A. Kilner

• Book ID: 113282473
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 920 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96265-m