✦ LIBER ✦
Microroughness measurements on polished silicon wafers: Abe, T.; Steigmeier, E. F.; Hagleitner, W.; Pidduck, A. J. Japanese Journal of Applied Physics, Part 1. 1992 Mar
- Book ID
- 103532059
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 151 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0141-6359
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