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Microresonators with Q-factors over a million from highly stressed epitaxial silicon carbide on silicon

✍ Scribed by Kermany, Atieh R.; Brawley, George; Mishra, Neeraj; Sheridan, Eoin; Bowen, Warwick P.; Iacopi, Francesca


Book ID
127244681
Publisher
American Institute of Physics
Year
2014
Tongue
English
Weight
998 KB
Volume
104
Category
Article
ISSN
0003-6951

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