Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device

✍ Scribed by A. Knoll; U. Dürig; O. Züger; H.-J. Güntherodt

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 253 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.219