Micromechanical membrane switches on silicon : K. E. Petersen. IBM J. Res. Dev.23, (4) 376 (July 1979)

• Book ID: 103276128
• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 118 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90300-5