Rijeka: InTech, 2012 - 300 p. โ ISBN: 978-953-307-906-6<div class="bb-sep"></div>Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major
Micromachining Techs. for Fab. of Micro, Nano Structs.
โ Scribed by M. Kahrizi
- Publisher
- Intech
- Year
- 2011
- Tongue
- English
- Leaves
- 308
- Category
- Library
No coin nor oath required. For personal study only.
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