Micromachining of quartz and its application to an acceleration sensor
โ Scribed by J.S. Danel; F. Michel; G. Delapierre
- Book ID
- 103957393
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 704 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0924-4247
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