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Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source

✍ Scribed by H. Fiedorowicz; A. Bartnik; M. Bittner; L. Juha; J. Krasa; P. Kubat; J. Mikolajczyk; R. Rakowski

Book ID: 113797615
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 225 KB
Volume: 73-74
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.02.063

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