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Micromachining of inorganic materials using plasma soft x-rays

✍ Scribed by Tetsuya Makimura; Satoshi Uchida; Takashige Fujimori; Hiroyuki Niino; Kouichi Murakami

Publisher
Wiley (John Wiley & Sons)
Year
2008
Tongue
English
Weight
535 KB
Volume
91
Category
Article
ISSN
1942-9533

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