Micromachining of high-contrast optical waveguides in [111] silicon wafers

✍ Scribed by Pandraud, G.; Veldhuis, G.; Berenschot, J.W.; Nijdam, A.J.; Hoekstra, H.J.W.M.; Parriaux, O.; Lambeck, P.V.

• Book ID: 119787768
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 361 KB
• Volume: 12
• Category: Article
• ISSN: 1041-1135
• DOI: 10.1109/68.826923