✦ LIBER ✦
Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser
✍ Scribed by S.-J. Qin; W.J. Li
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 317 KB
- Volume
- 74
- Category
- Article
- ISSN
- 1432-0630
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