Micromachining of circular ring microstructure by femtosecond laser pulses

✍ Scribed by W.L. Liang; B.K.A. Ngoi; L.E.N. Lim; K. Venkatakrishnan; C.W. Hee

• Book ID: 104159807
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 778 KB
• Volume: 35
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(03)00009-4

✦ Synopsis

In this paper, integration of interference phenomenon into femtosecond laser micromachining was reported as the femtosecond laser pulses were reshaped spatially to perform ablation. The generation of circular interference pattern was demonstrated by overlapping infrared femtosecond laser pulses. The interference pattern was subsequently focused on a copper substrate to ablate microstructures of concentric circular rings. The present technique is expected to open up new applications in the areas of rapid fabrication of micro-Fresnel lenses, hybrid microlenses and lens arrays.