Micromachining of amplitude and phase modulated reflective computer generated hologram patterns in silicon

✍ Scribed by Y.S. Ow; M.B.H. Breese; Y.R. Leng; S. Azimi; E.J. Teo; X.W. Sun

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 812 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.01.015