Micromachining by CO2 laser ablation: Building blocks for a multiport integrated device

✍ Scribed by G.V. Vázquez; A. Harhira; R. Kashyap; R.G. Bosisio

• Book ID: 103874598
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 744 KB
• Volume: 283
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/j.optcom.2010.03.047

✦ Synopsis

We report on the design and fabrication of complex microcomponents based on multimode optical interference, using a CO 2 laser ablation technique. Mode confinement, power division and losses are assessed. Power splitters show a good balance in the intensity division but beam combiners exhibit a variation in output power. The devices are compact and show a low sensitivity to imperfections in the fabrication process. The results demonstrate the technique's potential to develop multiport integrated circuits.