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Micromachined Wavelength Tunable Optoelectronic Devices with Record Tuning

✍ Scribed by Vail, E. C.; Wu, M. S.; Li, G.; Yuen, W.; Chang-Hasnain, C. J.

Book ID: 115436451
Publisher: Optical Society of America
Year: 1995
Tongue: English
Weight: 326 KB
Volume: 6
Category: Article
ISSN: 1047-6938
DOI: 10.1364/OPN.6.12.000026

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## Abstract A novel metal micromachining technique is presented, with which both area‐tuning and gap‐tuning variable capacitors are designed and fabricated. Mainly comprising nickel electroplating and gaseous isotropic etching, the developed micromachining technique can be processed in low resistiv