✦ LIBER ✦
Micromachined valve with hydraulically, actuated membrane, subsequent to a thermoelectrically controlled bimorph cantilever
✍ Scribed by H.-P. Trah; H. Baumann; C. Döring; H. Goebel; T. Grauer; M. Mettner
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 787 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0924-4247
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