Micromachined SPM probes with sub-100 nm features at tip apex
✍ Scribed by Schürmann, G.; Indermühle, P. F.; Staufer, U.; de Rooij, N. F.
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 245 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
We have developed a fabrication process that allows thin Ðlms to be patterned at the end of a sharp tip. Using this method, many di †erent material contrasts can be achieved on the apex of a scanning probe microscope tip. For example, small apertures down to 30 nm have been patterned into an aluminium Ðlm covering quartz tips to form scanning near-Ðeld optical microscopy probes. Also, small well-deÐned metal electrodes can be fabricated on the tip apex, which can be used for electrochemical measurements. The tip structuring process is a batch fabrication method and is based on CMOS-compatible technologies, which means that it can be integrated easily into an existing microfabrication process. Furthermore, it allows the patterning of a wide range of tip heights, materials or geometries.