Micromachined silicon suspended wires with submicrometric dimensions

✍ Scribed by P. Bruschi; A. Diligenti; M. Piotto

• Book ID: 114155285
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 582 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00477-4