✦ LIBER ✦
Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing
✍ Scribed by Su, Y; Evans, A G R; Brunnschweiler, A
- Book ID
- 120811365
- Publisher
- Institute of Physics
- Year
- 1996
- Tongue
- English
- Weight
- 215 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0960-1317
No coin nor oath required. For personal study only.