✦ LIBER ✦

Micromachined piezoelectric force sensors based on PZT thin films

✍ Scribed by Chengkuo Lee, ; Itoh, T.; Suga, T.

Book ID: 120738683
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 989 KB
Volume: 43
Category: Article
ISSN: 0885-3010
DOI: 10.1109/58.503715

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