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Micromachined Microsieves With High Aspect Ratio Features

โœ Scribed by Vaeth, K.M.

Book ID
114563635
Publisher
IEEE
Year
2012
Tongue
English
Weight
990 KB
Volume
21
Category
Article
ISSN
1057-7157

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Three-dimensional surface profilometry of microscale features such as high aspect ratio holes, pins, channels, gears, threads and more complex geometries such as free form, convex and concave shapes remain challenging metrology problems. Existing profilometers are designed to measure easy accessible