Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device

✍ Scribed by Lalinský, T.; Hudek, P.; Vanko, G.; Dzuba, J.; Kutiš, V.; Srnánek, R.; Choleva, P.; Vallo, M.; Držík, M.; Matay, L.; Kostič, I.

• Book ID: 122875345
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 383 KB
• Volume: 98
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2012.06.014