Micromachined electrochemical flow cell
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Yuji Murakami; Takashi Uchida; Toshifumi Takeuchi; Eiichi Tamiya; Isao Karube; M
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Article
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1994
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John Wiley and Sons
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English
โ 490 KB
A miniaturized electrochemical flow cell was fabricated on a silicon substrate using micromachining techniques, including photolithography, vacuum deposition, anisotropic etching, and fusion bonding. The flow cell consisted of a glass plate with gold electrodes, a silicon chip with a V-shaped groove