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Microlithography by using neutral metastable atoms and self-assembled monolayers

โœ Scribed by Berggren, K.; Bard, A; Wilbur, J.; Gillaspy, J.; Helg, A.; McClelland, J.; Rolston, S.; Phillips, W.; Prentiss, M; Whitesides, G.


Book ID
111866013
Publisher
American Association for the Advancement of Science
Year
1995
Tongue
English
Weight
998 KB
Volume
269
Category
Article
ISSN
0036-8075

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