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Microfabrication processes on cylindrical substrates – Part I: Material deposition and removal

✍ Scribed by Sean Snow; Stephen C. Jacobsen

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 438 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.06.003

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