✦ LIBER ✦
Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding
✍ Scribed by D. Zhang; B. Su; T.W. Button
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 129 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1438-1656
No coin nor oath required. For personal study only.