Microfabrication of thick tungsten films for use as absorbers of deep X-ray lithography masks

✍ Scribed by H. Okuyama; Y. Hirata; H. Takada

• Publisher: Springer-Verlag
• Year: 2001
• Tongue: English
• Weight: 177 KB
• Volume: 7
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420100091