Microfabrication of palladium-silver alloy membranes for hydrogen separation

✍ Scribed by Hien Duy Tong, ; Berenschot, J.W.E.; De Boer, M.J.; Gardeniers, J.G.E.; Wensink, H.; Jansen, H.V.; Nijdam, W.; Elwenspoek, M.C.; Gielens, F.C.; van Rijn, C.J.M.

• Book ID: 120884365
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 660 KB
• Volume: 12
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2003.818458