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Microfabrication of massive parallel micromirror-lenses by X-ray LIGA technique: recent advances and prospects

✍ Scribed by R. Kupka; F. Bouamrane; S. Megtert


Book ID
106184543
Publisher
Springer-Verlag
Year
2003
Tongue
English
Weight
361 KB
Volume
10
Category
Article
ISSN
0946-7076

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