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Microfabricated atomic vapor cell arrays for magnetic field measurements

โœ Scribed by Woetzel, S.; Schultze, V.; IJsselsteijn, R.; Schulz, T.; Anders, S.; Stolz, R.; Meyer, H.-G.

Book ID
115528973
Publisher
American Institute of Physics
Year
2011
Tongue
English
Weight
589 KB
Volume
82
Category
Article
ISSN
0034-6748

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โœ M. Hasegawa; R.K. Chutani; C. Gorecki; R. Boudot; P. Dziuban; V. Giordano; S. Cl ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 799 KB

This paper reports on the Si-glass anodic bonding process to fill micro Cs vapor cells with a buffer gas (Ar or Ne) at a controlled pressure (up to 20 kPa), which is one of the technological key steps to fabricate Cs vapor cells for miniature atomic clocks. In the atmosphere of these gases, the appl