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Microetching of fused silica by laser ablation of organic solution with XeCl excimer laser

✍ Scribed by Y. Yasui; H. Niino; Y. Kawaguchi; A. Yabe

Book ID: 108417568
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 177 KB
Volume: 186
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00635-3

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