𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Microelectronics and manufacturing industry

✍ Scribed by John Bessant


Book ID
103538737
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
517 KB
Volume
4
Category
Article
ISSN
0141-9331

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Advances in modeling and control will be required to meet future technical challenges in microelectronics manufacturing. The implementation of closed-loop control on key unit operations has been limited due to a dearth of suitable in situ measurements, variations in process equipment and wafer prope