Microelectronic applications of plasma-polymerized films
β Scribed by Y. Segui; Bui Ai
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 184 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0040-6090
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π SIMILAR VOLUMES
## Abstract An inductively coupled pulsedβplasma reactor was used to synthesize polyaniline thin films on several substrates positioned at various distances from the center of the radio frequency (RF) coil. The samples were characterized with Fourier transform infrared (FTIR), cyclic voltammetry, a
Plasma polymerization of thiophene was carried out in a tubular reactor using an rf source. Various substrates such as aluminum, glass, and NaCl crystal were used. The rate of deposition attained an equilibrium value of 0.35 g cm Οͺ2 s Οͺ1 . Infrared spectra revealed the formation of polythiophene. Th