Microelectromechanical Systems: All-Oxide Crystalline Microelectromechanical Systems: Bending the Functionalities of Transition-Metal Oxide Thin Films (Adv. Mater. 23/2009)

✍ Scribed by Luca Pellegrino; Michele Biasotti; Emilio Bellingeri; Cristina Bernini; Antonio Sergio Siri; Daniele Marré

• Publisher: John Wiley and Sons
• Year: 2009
• Tongue: English
• Weight: 530 KB
• Volume: 21
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200990089

✦ Synopsis

Freestanding structures can be employed to induce strain at their surfaces upon bending. Luca Pellegrino and co-workers show on p. 2377 that a crystalline SrTiO 3 (001) thin-fi lm cantilevered structure can be used as a fl exible substrate for the epitaxial deposition of correlated oxide fi lms. Surface strain generated by bending is transmitted to the epitaxial (La,Sr)MnO 3 fi lm, producing a reversible change of its electrical resistance.