Microelectromechanical switches based on amorphous diamondlike carbon films

✍ Scribed by V. A. Vlasenko; S. N. Belyaev; A. G. Efimov; É. A. Il’ichev; M. D. Malenkovich; V. É. Nemirovskiĭ; É. A. Poltoratskiĭ; A. V. Goryachev; A. F. Popkov; G. V. Frolova; M. L. Shupegin

• Book ID: 111450455
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2009
• Tongue: English
• Weight: 153 KB
• Volume: 35
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/s1063785009080148