Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution

✍ Scribed by Häusler, Gerd; Richter, Claus; Leitz, Karl-Heinz; Knauer, Markus C.

• Book ID: 115430462
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 359 KB
• Volume: 33
• Category: Article
• ISSN: 0146-9592
• DOI: 10.1364/OL.33.000396