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Microcrystalline-Silicon Transistors and CMOS Inverters Fabricated Near the Transition to Amorphous-Growth Regime

✍ Scribed by Kah-Yoong Chan; Gordijn, A.; Stiebig, H.; Knipp, D.

Book ID: 114619713
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 623 KB
Volume: 56
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2009.2026325

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