Microcantilevers for Atomic Force Microscope Data Storage

✍ Scribed by Benjamin W. Chui (auth.)

Publisher: Springer US
Year: 1999
Tongue: English
Leaves: 173
Series: Microsystems 1
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.
Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for Microcantilevers for Atomic ForceMicroscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.

✦ Table of Contents

Front Matter....Pages i-xxv
Introduction....Pages 1-10
Heater-cantilevers for writing: design, fabrication and basic characterization....Pages 11-28
Heater-cantilevers for writing: characterization, modeling and optimization....Pages 29-54
Piezoresistive cantilevers for readback....Pages 55-72
Dual-axis piezoresistive cantilevers: design, fabrication and characterization....Pages 73-92
Dual-axis piezoresistive cantilevers for tracking: applications....Pages 93-106
Conclusion and future work....Pages 107-116
Back Matter....Pages 117-148

✦ Subjects

Circuits and Systems; Electrical Engineering; Computer Science, general

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