Microcantilever array with embedded metal oxide semiconductor field effect transistor actuators for deflection control, deflection sensing, and high frequency oscillation

✍ Scribed by Chou, Stanley S.; Kim, Yun Young; Srivastava, Arvind; Murphy, Benjamin; Balogun, Oluwaseyi; Tark, Soo-Hyun; Shekhawat, Gajendra; Dravid, Vinayak P.

• Book ID: 120276604
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 552 KB
• Volume: 94
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3133333