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Microbolometer detector arrays for the infrared and terahertz ranges

✍ Scribed by Dem'yanenko, M. A.; Esaev, D. G.; Ovsyuk, V. N.; Fomin, B. I.; Aseev, A. L.; Knyazev, B. A.; Kulipanov, G. N.; Vinokurov, N. A.

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