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Micro-tip array fabrication by selective anodization of p-type Si substrate

✍ Scribed by Uehara, S. ;Sugimoto, J. ;Yono, D. ;Matsubara, T.

Book ID: 105362315
Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 157 KB
Volume: 197
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200306480

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