✦ LIBER ✦
Micro-Raman characterization of stress distribution within free standing mono- and poly-crystalline silicon membranes
✍ Scribed by M. Siakavellas; E. Anastassakis; G. Kaltsas; A.G. Nassiopoulos
- Book ID
- 114155834
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 297 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0167-9317
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