Micro-optical elements fabricated by electron-beam lithography and dry etching technique using top conductive coatings

✍ Scribed by R. Steingrüber; M. Ferstl; W. Pilz

• Book ID: 114155301
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 397 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00497-x