Micro and nanosystems represent a major scientific and technological challenge, with actual and potential applications in almost all fields of the human activity. The aim of the present book is to present how concepts from dynamical control systems (modeling, estimation, observation, identification, feedback control) can be adapted and applied to the development of original very small-scale systems and of their human interfaces. The application fields presented here come from micro and nanorobotics, biochips, near-field microscopy (AFM and STM) and nanosystems networks. Alina Voda has drawn contributions from leading experts at top research universities in France to produce a first overview of the major role that control systems science can play in the development of micro and nanosciences and technologies.Content:
Chapter 1 Modeling and Control of Stick?slip Micropositioning Devices (pages 1โ30): Micky Rakotondrabe, Yassine Haddab and Philippe Lutz
Chapter 2 Microbeam Dynamic Shaping by Closed?loop Electrostatic Actuation using Modal Control (pages 31โ56): Chady Kharrat, Eric Colinet and Alina Voda
Chapter 3 Observer?based Estimation of Weak Forces in a Nanosystem Measurement Device (pages 57โ84): Gildas Besancon, Alina Voda and Guillaume Jourdan
Chapter 4 Tunnel Current for a Robust, High?bandwidth and Ultraprecise Nanopositioning (pages 85โ120): Sylvain Blanvillain, Alina Voda and Gildas Besancon
Chapter 5 Controller Design and Analysis for High?performance STM (pages 121โ148): Irfan Ahmad, Alina Voda and Gildas Besancon
Chapter 6 Modeling, Identification and Control of a Micro?cantilever Array (pages 149โ196): Scott Cogan, Hui Hui, Michel Lenczner, Emmanuel Pillet, Nicolas Rattier and Youssef Yakoubi
Chapter 7 Fractional Order Modeling and Identification for Electrochemical Nano?biochip (pages 197โ220): Abdelbaki Djouambi, Alina Voda, Pierre Grangeat and Pascal Mailley
Chapter 8 Human?in?the?loop Telemicromanipulation System Assisted by Multisensory Feedback (pages 221โ256): Mehdi Ammi and Antoine Ferreira
Chapter 9 Six?dof Teleoperation Platform (pages 257โ300): Bruno Daunay and Stephane Regnier