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Micro-machining of metals, ceramics and polymers using nanosecond lasers

✍ Scribed by M. R. H. Knowles; G. Rutterford; D. Karnakis; A. Ferguson


Book ID
105852202
Publisher
Springer
Year
2007
Tongue
English
Weight
463 KB
Volume
33
Category
Article
ISSN
0268-3768

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Microstructuring of highly reflective metals was performed using high-power nanosecond-and picosecond-laser beam sources. This contribution mainly focuses on the ablation depth, achievable sidewall inclination angles and the ablation quality. Single-and multilayer structures with varying width and d