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Micro-IBICC and micro-IL analyses of CVD diamond microdosimeters

โœ Scribed by E. Vittone; C. Ricciardi; A. Lo Giudice; F. Fizzotti; C. Manfredotti; G. Egeni; V. Rudello


Book ID
114164830
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
763 KB
Volume
181
Category
Article
ISSN
0168-583X

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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr