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Micro-fabricated piezoelectric cantilever for atomic force microscopy

✍ Scribed by S. Watanabe; T. Fujii

Book ID: 125834213
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 581 KB
Volume: 67
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.1147290

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