✦ LIBER ✦
Micro-crystalline phase formation in hot wire deposited Si:C:H alloy films from pure methane and silane mixtures
✍ Scribed by A.A Kumbhar; R.O Dusane; S Bauer; B Schröder
- Book ID
- 117149042
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 94 KB
- Volume
- 227-230
- Category
- Article
- ISSN
- 0022-3093
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